Picture of Thin Film Analyzer
Current status:
AVAILABLE
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The instrument setup consists of a UV light source and film thickness instrument. Filmetrics F20 uses spectroscopic reflecting light, then analyzes this light over a range of wavelengths. The thicker the film, the more oscillations. The amplitude of the oscillations will help determine by the refractive index n and extinction k coefficients of the films and substrate. Single layer or multilayer films on substrates can be measured and analyzed. Typically, the F20 will measure thickness values between 150Å and 50um. The large spot size is about 1.5mm diameter.

The computer is obsolete and can not use LiU network so do not attempt to connect it to LiU network

Tool name:
Thin Film Analyzer
Area/room:
Cleanroom_Evaporation Lab
Category:
Metrology
Manufacturer:
Filmetrics /Hamamatsu
Model:
F20-UV / L10290

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Licensed Users

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