Picture of Glovebox metal evaporator
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Glovebox evaporator is a thermal evaporator for metals. It has manual power control and three sources which can be used separately for co-deposition. System has two doors, one for entering through glovebox with inert atmosphere and one service door to the back for service or rigging, remember to always pumpdown and vent once after using the rear service door. Due to limitations in power not all materials or boats can be used, they have to fit this setup in order to work properly.

Tool name:
Glovebox metal evaporator
Area/room:
Cleanroom_Open Area
Category:
Thin film deposition
Manufacturer:
Moorfield
Model:
T090M

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