Picture of Vaksis 2-source PVD Evaporator (Nemo)
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Description

Link to manual in the internal wiki page.

 

https://liuonline.sharepoint.com/:b:/r/teams/ts4/42069/Shared%20Documents/LOE%20Equipments%20Manuals/PVD/PVD%20Handy%202T-MANUAL%20Link%C3%B6ping.pdf?csf=1&e=ZatHum

Details
Tool name:
Vaksis 2-source PVD Evaporator (Nemo)
Area/room:
Cleanroom_Evaporation Lab
Category:
Thin film deposition
Manufacturer:
Vaksis
Model:
Handy/T2
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