Picture of Mask Cleaner
Current status:
AVAILABLE
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The mask cleaner is a part of the Solitec 5110 wafer processing bench. It works with soacetone and a high-pressure spray washer to clean wafers and masks.

Tool name:
Mask Cleaner
Area/room:
Cleanroom_Lithography room
Category:
Sample prep
Manufacturer:
Solitec
Model:
Solitec

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