Picture of Programmable Hotplate
Current status:
AVAILABLE
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SUSS MicroTec‘s manual hot plate HP8 has been developed
specifically to meet the requirements of R&D work and small
scale production. The 200 mm hot plate (HP8) offers homogeneous
temperature distribution as well as heating ramps
with high repeating accuracy to ensure constant and stable
process results.

Tool name:
Programmable Hotplate
Area/room:
Cleanroom_Lithography room
Category:
Thermal processes
Manufacturer:
Suss
Model:
HP8

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