Picture of SpinRinseDryer (SRD) FSI
Current status:
AVAILABLE
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SRD:s are used for rinsing and drying of one or more wafers placed in a cassette.

Tool name:
SpinRinseDryer (SRD) FSI
Area/room:
Cleanroom_Lithography room
Category:
Lithography
Manufacturer:
FSI
Model:
Phoenix

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