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Spin Rinse Dryer (SRD) (2310120)

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AVAILABLE

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Description

SRD:s are used for rinsing and drying of one or more wafers placed in a cassette.

Details

Tool name:

Spin Rinse Dryer (SRD)

Area/room:

Cleanroom_Lithography room

Category:

Lithography

Manufacturer:

STI

Model:

ST 270 D

Tool Modes

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