Picture of SpinRinseDryer(SRD) STI
Current status:
AVAILABLE
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Description

SRD:s are used for rinsing and drying of one or more wafers placed in a cassette.

Details
Tool name:
SpinRinseDryer(SRD) STI
Area/room:
Cleanroom_Lithography room
Category:
Device mounting
Manufacturer:
STI
Model:
STI
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