Picture of RIE / Plasma Enhanced CVD
Current status:
AVAILABLE
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Description

Safety
Plasma equipment with risk to human if not properly use. 

Acreo inventory #231034

Details
Tool name:
RIE / Plasma Enhanced CVD
Area/room:
Cleanroom_Dry Etch lab
Category:
Dry etching
Manufacturer:
Advanced Vacuum (Vacutec)
Model:
Na
Instructors & Licensed Users

Instructors

Licensed Users

Process Lines
Basic photolithography line
Tool Modes
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