Picture of Wafer baker/vacuum hot plate
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Description

The wafer baking hot plate  is a part of the Solitec 5110 wafer processing bench, used for baking single wafers under vacuum.

Details
Tool name:
Wafer baker/vacuum hot plate
Area/room:
Cleanroom_Lithography room
Category:
Thermal processes
Manufacturer:
Solitec
Model:
BPM-2000
Process info
  1. Open the lid and place wafer on the hot plate, then close the lid
  2. Press green ON button
  3. Press START button
  4. Wait for buzzer alarm which tells you that the process is finished
  5. Open the lid and remove your sample - CATION HOT!
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