The Sensofar PLux neox is an optical profilometer capable of both confocal and interferometric profiling.

The confocal mode of operation is suitable for rough surfaces. It offers the best lateral resolution and good z-range, but the z-resolution is worse than the interferometric methods. Either a white or blue LED can be used for measurements, and a color image can be recorded with the profile.

The interferometric methods are more suitable for smoth surfaces. There is three interferometric modes of operation, PSI, ePSI and VSI. PSI offers the best z-resolution but the z-range is limited to a couple of mircometers. ePSI stitches several PSI measurements together for a longer z-range. VSI uses the white LED and has a limited (i.e: worse) z-resolution but longer z-range than PSI.

The xyz-table is fully motorized and can only be controlled from the computer. The z-stage can move either by piezo (200 um range) or a linear motor (40 mm range).

It has an automated objective turrent with room for 5 objectives. By default a 5x, 20x and 50x confocal objective and a 5x and 20x interferometric objective is installed. A 20x water submerged confocal objective is also available for installation.

The software SensoScan is used for acquisition and processing of data. The program (demo version?) can also be installed and used for processing data on other computers.

Booking is compulsory.