If you want to use only SEM make sure the Beam Blanker is deactivated. Shut down EDX  if it is running..

If you want to use EDX, set Ext Scan Select = Ext 1 and deactivate Beam Blanker in Use option.

EBL mounted on the SEM cannot be used!

In case of troubles refer to the mail sent by Slawomir. Note that you are not allowed to shut down the SEM microscope (by pressing red button) by yourself.