The μMLA is a high-speed direct write lithography tool extended by capabilities formerly only available on Mask Aligners. It can expose the patterns directly without prior fabrication of a mask resulting in a significantly shorter prototyping cycle. It offers high alignment accuracy and a light source which generates sufficient dose to expose even thick and less sensitive resists. The system provides flexible change of pattern and software corrections. The system can produce structures down to 1 μm.

Here is the list of rules:

1.  Booking opportunities will be allocated per user.
2.  Booking name must correspond to the operator.
3.  Booking must be made for the time needed on the machine!
4.  Users are encouraged to check the calendar and make booking proactively
5.  The rules must be followed under the penalty of losing the license.
6. If the tool is found unused after 1 hour in the booked slot, anyone can use the tool on a first-come-first-serve basis. Please keep evidence that the tool was not used to avoid any conflicts. Inform tool responsible person about it.
7. it is mandatory to send booking cancellations by email. If cancellations are not done at least 24 hours in advance,  the booking will still be considered as “one slot taken” as for the case of short exposures.
8. In exceptional circumstances, where >48 hours of exposure are needed or when a project has a pressing need, a user can agree to transfer their allocated time slot to another user. In that case, you have to cc the persons responsible for the tool in the relevant emails so that the "fair use time" calculations are not misinterpreted. 

Booking rules:

For weekdays (Mon 9 am – Fri 9 pm) the following on demand rules apply:

• For long exposures (> 6 hours), a maximum of one booking can be made at a time, with a total booking time not exceeding 48 hours. if the latest booking is used up and the tool is still free a group can make a next booking. (This prevents long bookings that block other users for week(s), this is also what among others Han-Yan suggested).
• For short exposures (=<6 hours), a maximum of two bookings can be made per weekdays and user at a time. if the latest short bookings are used up and the tool is still free a group can make next booking.
• For weekends (9 pm Friday – 9 am Monday), a rotational system between group to be adopted:

      x.    A group can book for a maximum of 24 hours at a time. If the latest booking is used up and the tool is still free a user can make a next booking.

(Updated on September 11, 2024)