Picture of Programmable spin coater for photo resist EMS
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The Photo Resist Spinner Model 4000 from Electronic Micro Systems provides
a simple and economical means of applying highly accurate resist coatings to
silicon wafers and ceramic substances. Spinning the wafers between 150 and
9,5000 rpm using computer control ensures precise repeatability for production
of batch wafers.
Tool name:
Programmable spin coater for photo resist EMS
Category:
Thin film deposition
Manufacturer:
EMS
Model:
4000

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